Advanced Energy Introduces 401M Mid-Infrared Pyrometer for Precise Semiconductor Process Control
Advanced Energy Industries, Inc. announces the launch of the 401M mid-infrared optical pyrometer, designed for high-precision, non-contact temperature measurement in semiconductor and industrial process environments.
Engineered for speed and accuracy, the 401M enables real-time closed-loop control with response times as low as 1 microsecond and accuracy within ±3°C across a wide temperature range of 50°C to 1,300°C, based on measurement wavelength. Its mid-infrared technology is ideal for preferential measurement through transparent surfaces, as well as outside of the process environment, making it ideal for lamp-heated epitaxy, CVD, and thin-film glass coating processes where traditional near-IR pyrometers are ineffective.
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“The 401M sets a new benchmark in speed, accuracy and repeatability,” said Dhaval Dhayatkar, Advanced Energy’s vice president, Critical Sensing and Control, System Power. “By providing reliable, interference-free monitoring of chamber conditions, the 401M supports process innovation and operational efficiency in semiconductor and industrial processes.”
With EtherCAT® communication built into the hardware, the 401M eliminates the need for external modules, simplifying tool integration and reducing potential failure points. Customizable measurement wavelengths, temperature range, working distance and spot size enable it to be adapted across various deposition environments and materials, meeting the evolving needs of advanced process environments. It is backwards compatible with the existing OR400M platform, for a simple and cost-effective upgrade.
For more information on the 401M, please visit here.