Advanced Energy’s New Power Controller – Thyro-XD – Increases Stability of Semiconductor and Industrial Processes
Advanced Energy Industries, Inc., a global leader in highly engineered, precision power conversion, measurement and control solutions, announced a new silicon-controlled rectifier (SCR) power controller for precision control of lamp-based heating applications. Delivering unprecedented speed and accuracy, the new Thyro-XD™ supports next-generation semiconductor manufacturing and industrial processes that demand precision temperature control, especially during extreme and dynamic ramps.
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“Demand for smaller, faster, and more efficient computer chips is driving the need for innovative controls in wafer processing equipment for semiconductor production,” said Dhaval Dhayatkar, Advanced Energy’s vice president, Critical Sensing and Control Products, System Power. “The new Thyro-XD offers unmatched speed and precision for temperature control, significantly enhancing stability and repeatability, particularly for lamp-based heating applications, in the smallest form factor available.”
The Thyro-XD provides highly accurate, rapid load resistance measurement, enabling faster detection of temperature changes and tighter process control. It has a high-power density of 188 W/in3, is optimized for semiconductor tools, and doubles the control capacity versus other available products. With convection cooling, it eliminates the need for fans, improving simplicity and reliability.
With real-time resistance measurement, the Thyro-XD SCR can prevent potential damage to resistors, reducing expensive maintenance and replacement. In addition, a five-fold increase in load voltage, load current and output power accuracy enables fastest compensation for input fluctuations while increasing efficiency.
The Thyro-XD provides optional EtherCat connectivity through optional Advanced Bus Module™ (ABM) and interface cards and can integrate temperature feedback from multiple Advanced Energy Impac® measurement pyrometers for real-time temperature control.
For more information on Advanced Energy’s Thyro-XD SCR power controller click here and the ABM click here.